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Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus
专利权人:
Yasutoshi Takada
发明人:
Yasutoshi Takada,Akira Tokuhisa
申请号:
US13075486
公开号:
US09153934B2
申请日:
2011.03.30
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength. A control unit controls each of the temperature regulators such that the temperature of the corresponding nonlinear optical crystal reaches the temperature to be set in accordance with the output wavelength instruction signal.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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