Pedro P. Irazoqui,Dohyuk Ha,William J. Chappell,Simon W.M. John
申请号：
US15465107
公开号：
US20180035888A1
申请日:
2017.03.21
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Certain pressure sensor devices are much smaller than prior art devices, yet are at least as sensitive as the prior art devices. A capacitive pressure sensor can include a flexible substrate that permits bending of a pressure sensing region without significantly affecting operation thereof. The pressure sensor can include a flexible membrane in which an electrode is sandwiched between two layers of polymeric material. The sandwiched electrode can be extremely close to a reference electrode so as to provide for highly sensitive capacitance readings, yet the membrane can be restricted from contacting the reference electrode under high pressure condition.
