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超音波トランスデューサーデバイス、超音波測定装置及び超音波画像装置
专利权人:
セイコーエプソン株式会社
发明人:
鶴野 次郎
申请号:
JP2013247767
公开号:
JP6291814B2
申请日:
2013.11.29
申请国别(地区):
JP
年份:
2018
代理人:
摘要:
An ultrasonic transducer device includes a substrate (220) in which a first opening (10a) and a second opening (10b) are provided, a first ultrasonic transducer element that is formed on the substrate (220) in correspondence with the first opening (10a), and a second ultrasonic transducer element that is formed on the substrate (220) in correspondence with the second opening (10b). The first opening (10a) has a first edge portion (EDA) on a first direction side and a second edge portion (EDB) on a second direction side, the first direction corresponding to a scan direction and the second direction being in the opposite direction to the first direction. Also, the first ultrasonic transducer element includes a first vibrating film (70a) that blocks the first opening (10a), and a first piezoelectric layer (60a) that is provided on the first vibrating film (70a) so as to cover the first edge portion (EDA) of the first opening (10a) in plan view from a thickness direction of the substrate (220).
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中国工程科技知识中心
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