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Tomographic image capturing apparatus and method with noise reduction technique
专利权人:
发明人:
Toshiharu Sumiya,Makoto Fukuhara,Makoto Sato
申请号:
US14870959
公开号:
US10126112B2
申请日:
2015.09.30
申请国别(地区):
US
年份:
2018
代理人:
摘要:
An object is to enable removal fixed pattern noise even if the intensity of interference light changes during measurement. An image capturing apparatus comprises a light splitting unit that splits light emitted from a light source into reference light and measurement light, an interference signal detection unit that acquires an interference signal from interference light resulting from interference of the reference light and return light generated by irradiating an object to be inspected with the measurement light, a noise signal acquisition unit that acquires a noise signal containing a noise component contained in the interference light, a correction unit that corrects the intensity of one of the interference signal and the noise signal, and a noise removal unit that removes the noise component contained in the interference signal using the interference signal and the noise signal one of which is corrected.
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