PROBLEM TO BE SOLVED: To enhance irradiation beam quantity by suppressing transition beam quantity when blocking a beam in a scanning irradiation system.SOLUTION: The particle beam irradiation apparatus has a beam deflector 2 changing the advancing direction of a charged particle beam 1 by an electric field and carrying out irradiation and blocking of the beam 1 to the object 16 to be irradiated and the beam deflector control device 7 outputting the voltage pulse 31 to the beam deflector 2, the beam deflector 2 has the line electrode plate 24 where a plurality of conductor plates 27a to 27h constituted by lining short directions in the advancing direction of the beam 1 are arranged and the electrode plate 26 arranged parallel to the line electrode plate 24, the conductor plates 27a to 27h are connected in series in a longitudinal direction and are matched in impedance, the beam deflector control device 7 outputs the voltage pulse 31 constituted by synchronizing the transmission basic time TVO transmitting the longitudinal directions of the conductor plates 27a to 27h to the particle movement basic time TPO when the beam 1 passes through the short sides of the conductor plates 27a to 27h.COPYRIGHT: (C)2012,JPO&INPIT【課題】スキャニング照射方式におけるビーム遮断の際の過渡線量を抑制し、照射線量精度を向上させることを目的とする。【解決手段】荷電粒子ビーム1の進行方向を電場により変更し、照射対象16へのビーム1の出射及び遮断を行うビーム偏向器2と、電圧パルス31をビーム偏向器2に出力するビーム偏向器制御装置7を備え、ビーム偏向器2は、ビーム1の進行方向に短手方向を並べた複数の導体板27a~27hが配置されたライン電極板24と、ライン電極板24に平行に配置された電極板26を有し、導体板27a~27hは、長手方向に直列に接続され、インピーダンス整合がされており、ビーム偏向器制御装置7は、ビーム1が導体板27a~27hの短手方向を通過する粒子移動基本時間TP0に、導体板27a~27hの長手方向を伝送する伝送基本時間TV0を同期させた電圧パルス31を出力する。【選択図】図2
