PROBLEM TO BE SOLVED: To provide a washing device capable of continuously washing a washing target.SOLUTION: In a washing device provided with a first supply part supplying a first washing liquid generated in a generation device and a second supply part supplying a second washing liquid from a second washing liquid tank storing the second washing liquid,: the supply of the first washing liquid by the first supply part and the supply of the second washing liquid by the second supply part are controlled； and the supply of the first washing liquid by the first supply part is switched to the supply of the second washing liquid by the second supply part when determining whether abnormality on the generation of the first washing liquid in the generation device occurs and determining the occurrence of the abnormality.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2020,JPO&INPIT【課題】洗浄対象の洗浄を継続できる仕組みを提供することを目的とする。【解決手段】本発明は、生成装置で生成された第１洗浄液を供給する第１供給部と、第２洗浄液を貯留する第２洗浄液タンクから第２洗浄液を供給する第２供給部とを備える洗浄装置であって、第１供給部による第１洗浄液の供給と、第２供給部による第２洗浄液の供給とを制御し、生成装置での第１洗浄液の生成に異常が生じたか否かを判断し、異常が生じたと判断された場合に、第１供給部による第１洗浄液の供給から第２供給部による第２洗浄液の供給に切り替えることを特徴とする。【選択図】図１
