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WAVEFRONT CONTROL APPARATUS, WAVEFRONT CONTROL METHOD, INFORMATION ACQUIRING APPARATUS, AND STORAGE MEDIUM
专利权人:
CANON KABUSHIKI KAISHA
发明人:
Takahiro Masumura
申请号:
US15635682
公开号:
US20180010961A1
申请日:
2017.06.28
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A wavefront control apparatus includes a detector configured to detect a signal generated from a medium onto which light is irradiated, and a controller configured to control a wavefront of the light based on an output of the detector. The controller performs first processing for forming a first wavefront of the light based on the signal generated from a first measurement position in the medium, and second processing for forming a second wavefront of the light based on the signal generated from a second measurement position different from the first measurement position in the medium onto which the light having the first wavefront is irradiated.
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中国工程科技知识中心
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http://www.ckcest.cn/home/
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