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MEMS based filter and catalizer
专利权人:
David Hirshberg
发明人:
David Hirshberg
申请号:
US13645522
公开号:
US09579446B2
申请日:
2012.10.05
申请国别(地区):
US
年份:
2017
代理人:
摘要:
The present invention provides a filter for separating particles and/or catalyzer for particle reaction in a fluid. The device comprising array of passageways fabricated on a die wherein the passageway size is controlled by actuators. The passageway size is monitored and the actuators controlling the passageway size are activated conditionally upon the passageway size monitoring. Using movable actuators the passageway can achieve passageway size that is less then the fabrication minimal resolution. Proper locating, setting and/or activation of the actuators create passageways that can perform filtration of particles, trapping of particles and catalyzing particles reaction.
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