Michael P. Toben,Robert K. Barr,Corey O'Connor,Corey OConnor
申请号:
US14295262
公开号:
US09303207B2
申请日:
2014.06.03
申请国别(地区):
US
年份:
2016
代理人:
摘要:
Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.