Implantable biocompatible components with built-in active sensors, microelectromechanical systems or integrated circuits for measuring physiological parameters
The component has a silicon or quartz based substrate (12) with an active element (14) that is integrated to the substrate. Metallic studs (16) are located on a face of the substrate opposite to a face in which the active element is integrated. The substrate comprises connection vias (20) connecting the studs to conductors (18) in contact with the element. The studs are formed of gold coated studs. The screw is screwed through the substrate and filled with a metal. The element has radiofrequency and/or telesupplied circuits.
