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GRILLE MÉTALLIQUE À RAYONS X, DISPOSITIF D'IMAGERIE À RAYONS X ET PROCÉDÉ DE PRODUCTION POUR GRILLE MÉTALLIQUE À RAYONS X
专利权人:
Hamamatsu Photonics K.K.
发明人:
申请号:
EP18781327.4
公开号:
EP3608694A1
申请日:
2018.02.27
申请国别(地区):
EP
年份:
2020
代理人:
摘要:
A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member; and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member; a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
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