A method of decontaminating articles. comprising the steps of: (a) moving a plurality of articles having a known temperature along a first path (b) conveying a carrier gas along a second path that includes an elongated plenum, the second path intersecting the first path downstream from the plenum (c) heating the carrier gas to a temperature of at least about 105°C at a location upstream of the plenum (d) introducing into the carrier gas in the plenum an atomized mist of a liquid hydrogen peroxide of known concentration and (e) controlling the following: (I) the volumetric flow of carrier gas along the second path (2) the volume of hydrogen peroxide introduced into the carrier gas and (3) the temperature of the carrier gas introduced into the plenum, such that the concentration of the vaporized hydrogen peroxide in the carrier gas where the first path intersects the second path has a dew point temperature below the known temperature of the articles.
