Fine-structure transfer apparatus and method

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专利权人:

Kyoichi Mori

发明人:

Kyoichi Mori,Naoaki Yamashita,Noritake Shizawa,Koji Tsushima

申请号：

US12711377

公开号：

US08096800B2

申请日:

2010.02.24

申请国别(地区):

US

年份:

2012

代理人:

摘要：

A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.

来源网站：

中国工程科技知识中心

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http://www.ckcest.cn/home/