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ULTRASONIC PROBE AND ULTRASONIC INSPECTION APPARATUS
专利权人:
SEIKO EPSON CORPORATION
发明人:
Tomoaki NAKAMURA,Hiroaki HOSOMI
申请号:
US14859901
公开号:
US20160007963A1
申请日:
2015.09.21
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An ultrasonic probe includes a substrate, a diaphragm, a thin-film piezoelectric element, a communication passage, and an air hole. The substrate has first and second cavities thereon. The diaphragm is configured at the first cavity. The thin-film piezoelectric element is configured to the diaphragms. The communicating passage is configured in the substrate and extending from the first cavity to the second cavity. The air hole extends between the communicating passage to an outside of the substrate.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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