Kyushu University; National University Corporation
发明人:
Renshi SAWADA,Eiji HIGURASHI
申请号：
US13705558
公开号：
US20130137994A1
申请日:
2012.12.05
申请国别(地区):
US
年份:
2013
代理人:
摘要：
A highly miniaturized biosensor and a sensor unit, which can meet a demand for further miniaturization. With this invention, miniaturization is possible, and the number of production steps including those for assembling individual parts can be reduced. Accordingly, mass production will be possible, and cost reduction and high reliability will be achieved. A light emitting unit (21) is disposed within a first recess (24a) formed on a semiconductor substrate (23a), and light receiving unit (22) is disposed within a second recess (24b) formed on a surface of a semiconductor substrate (23b), and a light shielding cover substrate (27a) having a first light guide section (25) is disposed so as to cover the first recess (24a), and a transparent substrate (29a) is provided on an upper side of the light shielding cover substrate (27a), and another light shielding cover substrate (27b) having the second light guiding section (26) is disposed so as to cover the second recess (24b), and a transparent substrate (29b) is provided on an upper side of the light shielding cover substrate (27b), and each light receiving surface of the light receiving elements (28) is connected to one end of corresponding one of the second light guiding sections (26) so as to conform to each other without any gap.
