Wei-Chih Wang,Eric Seibel,Per Reinhall,Mark Fauver,Chris Brown
申请号：
US12434129
公开号：
US08396535B2
申请日:
2009.05.01
申请国别(地区):
US
年份:
2013
代理人:
摘要：
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro-electro-mechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end of the cantilever.
