An ablation probe which includes a probe body with a distal and proximal end, an ablation tip at the distal end of the probe body, an anode provided proximate to the ablation tip, a coaxial cable disposed within the probe body and coupled to the ablation tip and anode so that electromagnetic energy of a predetermined frequency is communicated thereto for dielectric heating of tissue, and a Parylene C coating on at least the ablation tip and anode to electrically isolate the ablation tip and anode from tissue without interference with microwave energy transmission through the probe to the tissue. The Parylene C is a vapor deposited coating on at least the ablation tip and anode to electrically isolate the ablation tip and anode from tissue.