PROBLEM TO BE SOLVED: To provide a lattice type X-ray phase imaging device capable of detecting a periodic pattern having a shorter period than that in conventional X-ray imaging devices.SOLUTION: An X-ray imaging device for imaging an object to be inspected 4, includes: a lattice 3 for forming a periodic pattern using X-rays from an X-ray source 1； and a detector 5 for detecting the periodic pattern. When an angle formed between a first direction that is a periodic direction of the periodic pattern in a plane perpendicular to an optical axis 210 of X-rays and a straight line parallel to an X-ray reception surface of the detector 5 in the same plane is &thetas；and a diagonal incident angle of X-rays with respect to the X-ray reception surface is &thetas；, the following expression is satisfied. An angle formed between the surface of the lattice 3 and the optical axis 210 of X-ray is 45° or more and 90° or less.【課題】従来に比べて周期の短い周期パターンの検出が可能な格子型Ｘ線位相イメージング装置を提供する。【解決手段】Ｘ線撮像装置は、Ｘ線源１からのＸ線を用いて周期パターンを形成する格子３と、周期パターンを検出する検出器５と、を備えた被検査物４を撮像するＸ線撮像装置である。Ｘ線の光軸２１０に垂直な平面内における周期パターンの周期方向である第１の方向と、同平面内における検出器５のＸ線受光面に平行な直線とのなす角をθ１とおき、また、Ｘ線受光面に対するＸ線の斜入射角をθ２とおいた時、が成り立つ。また、格子３の表面とＸ線の光軸２１０とがなす角度が４５°以上９０°以下である。【選択図】図１
