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Dissolved oxygen sensor
专利权人:
Entegris—Jetalon Solutions; Inc.
发明人:
Francisco Javier Machuca,Kyle William Montgomery,Ronald Phillip Chiarello
申请号:
US14529504
公开号:
US09541539B2
申请日:
2014.10.31
申请国别(地区):
US
年份:
2017
代理人:
摘要:
Embodiments of a dissolved oxygen sensor are disclosed herein. Embodiments as disclosed herein may include a window of optically transparent material disposed in an opening in a fluid flow path, where a luminophor is attached to the side of the window exposed to the fluid in the flow path. An optical probe may be disposed opposite the window from the fluid flow path on an axis at an angle to the window fluid flow path. The optical probe includes an excitation light source for illumination of the luminophor and a reference light source. An optical reception guide is configured to conduct light from the luminophor to a photodiode adjacent to the end of the optical reception guide distal the window when the luminophor is illuminated by the excitation light source. The optical probe is configured to determine a measure of oxygen concentration of the fluid in the flow path. The optical reception guide and photodiode may be aligned on axis, where the axis may be substantially parallel with the axis on which the optical probe is aligned.
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