PURPOSE: A contact force sensor package is provided to center the transmission of the contact force through an elastic layer on the free end unit of cantilever by attaching to the elastic layer to the free end unit of cantilever. CONSTITUTION: A board layer(101) comprises a transformation detection device(110) created the electric signal according to about deformation of the cantilever(105) transfiguring and cantilever with the contact force. An elastic layer(120) is attached to one side of a board layer in order to protect cantilever. The elastic layer is attached to the free end unit of cantilever. The elastic layer comprises a first engaging unit(122) attached to the free end unit and a cavity(126) formed in around the first engaging unit the first engaging unit and level difference A-frame. The elastic layer is formed around the cavity as same height with the first engaging unit and attached to the board layer. The elastic layer comprises the silicon resin or the PDMS.개시된 접촉힘 센서 패키지는 접촉힘(contact force)에 의해 변형하는 외팔보(cantilever beam)와, 이 외팔보의 변형 정도에 따른 전기 신호를 생성하는 변형 감지 요소를 구비한 기판층, 및 외팔보를 보호하기 위하여 기판층의 일측면에 부착되는 탄성층을 구비한다. 탄성층은 외팔보의 자유단부에만 부착되고, 자유단부의 주변에는 부착되지 않는다.
