David Gaudiosi,Michael Greenberg,Michael Mielke,Tim Booth,Gordon Masor
申请号：
US13208259
公开号：
US08884184B2
申请日:
2011.08.11
申请国别(地区):
US
年份:
2014
代理人:
摘要：
An apparatus for athermal ablation of a workpiece. The apparatus may include a laser device to direct a laser beam at the workpiece to remove a plurality of sections from the workpiece by athermal ablation. The removal may occur in a plurality of discrete motions that cause the laser beam to trace along outer perimeters of the sections in a specific order maintaining mechanical stability of the plurality of sections. The apparatus may further include a process gas nozzle to deliver process gas coaxially with the laser beam to clear debris and cool the workpiece, and a workpiece holder to hold and maneuver the workpiece during the removal of the plurality of sections.
