PROBLEM TO BE SOLVED: To allow precise visual inspection of a stereoscopic inspection object such as micro needle using image processing.SOLUTION: An average interval between a plurality of projections in an X-axis direction is denoted by L, an average interval in a Y-axis direction by L, a maximum height of an area for visual inspection in height directions of the projections is denoted by H, and a maximum thickness of the projections is denoted by W. When a first optical axis tilt mechanism sets a first optical axis horizontal tilt angle αto be in a range satisfying -W<；m*L*sinβcosα-sinα(m*L*cosβ+n*L)<；W (conditional expression 1)(m, n are any integers), a first lens inclination mechanism 32 sets a first lens vertical tilt angle θ, and a first image pick-up device tilt mechanism 31 sets a first imaging tilt angle θ, respectively to be in a range in which a first optical axis vertical tilt angle θsatisfies (conditional expression 2).SELECTED DRAWING: Figure 3【課題】マイクロニードル等の立体的な検査対象物の外観検査を精度よく画像処理にて実現可能とする。【解決手段】複数の突起物の、Ｘ軸方向における突起物同士の平均間隔をＬx、Ｙ軸方向における平均間隔をＬy、各突起物の高さ方向の内、外観検査の対象となる領域の最大高さをＨ、各突起物の最大太さをＷとするとき、第一光軸傾斜機構でもって、第一光軸水平傾斜角αOA1を－Ｗ＜ｍ・Ｌx・ｓｉｎβｃｏｓαOA1－ｓｉｎαOA1（ｍ・Ｌx・ｃｏｓβ＋ｎ・Ｌy）＜Ｗ（条件式１）（ｍ、ｎは任意の整数）を満たす範囲に設定したとき、第一レンズ傾斜機構３２でもって第一レンズ垂直傾斜角θL1を、第一撮像素子傾斜機構３１でもって第一撮像傾斜角θI1を、それぞれ第一光軸垂直傾斜角θOA1が（条件式２）を満たす範囲に設定する。【選択図】図３
