PROBLEM TO BE SOLVED: To reduce gas contained in liquid to be supplied from a liquid transport device.SOLUTION: A liquid transport device according to the present invention comprises: a pump that sends liquid from one side to the other a first flow passage that supplies the liquid to the pump and a filter provided in the first flow passage. When a pressure difference between the upstream side and the downstream side of the filter in the first flow passage is defined as a filter passage pressure, a bubble point of the filter is larger than a minimum value of the filter passage pressure generated during operation of the pump.COPYRIGHT: (C)2016,JPO&INPIT【課題】液体輸送装置から供給される液体に含まれる気体を減らす。【解決手段】本発明は、液体を一方から他方に送り出すポンプと、前記ポンプに前記液体を供給する第一の流路と、前記第一の流路中に設けられたフィルターとを備える液体輸送装置であって、前記第一の流路内における前記フィルターの上流側と下流側の圧力差をフィルター通過圧力とすると、前記フィルターのバブルポイントは、前記ポンプの動作中に生ずる前記フィルター通過圧力の最小値より大きい。【選択図】図8
