The present invention inter alia relates to an apparatus. The apparatus comprises a body part, wherein the body part is made from a cyclic olefin polymer material or a cyclic olefin copolymer material or a mixture therefrom, and a diaphragm valve with a diaphragm, wherein at least a surface portion of the diaphragm is made from a diaphragm material, wherein said diaphragm material is a fluoroelastomer material or a perfluoroelastomer material or a mixture therefrom.