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検査装置、検査方法及び非接触式センサ
专利权人:
長野県;株式会社小松精機工作所
发明人:
小口 京吾,小松 隆史
申请号:
JP20160056194
公开号:
JP6283965(B2)
申请日:
2016.03.18
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
Provided are a non-contact sensor (10) and an inspection method that uses the non-contact sensor (10), the non-contact sensor (10) being configured such that a magnetic circuit is constituted by an excitation coil (13), a first detection coil (11) and a second detection coil (12), and the first detection coil (11) and the second detection coil (12) are formed so as to be symmetrical with each other in terms of the magnetic circuit. An inspection device (20) comprises: a first input unit (21) to which a signal is input from the first detection coil (11); a second input unit (22) to which a signal is input from the second detection coil (12); a difference calculating unit (23) that calculates a difference between a first signal from the first input unit (21) and a second signal from the second input unit (22); a signal processing unit (24) that processes a difference signal calculated by the difference calculating unit (23); and an oscillation unit (25) that generates an excitation signal for the excitation coi
来源网站:
中国工程科技知识中心
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