Detection method for assessing the efficiency of a cleaning operation
- 专利权人:
- 发明人:
- Marcia A Frieze
- 申请号：
- US15144864
- 公开号：
- US09885664B2
- 申请日:
- 2016.05.03
- 申请国别(地区):
- US
- 年份:
- 2018
- 代理人:
- 摘要：
- A method of assessing the efficiency of a cleaning operation and assessing likely residual contamination on substrates after a cleaning operation.
- 来源网站：
- 中国工程科技知识中心
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