DEVICE FOR IRRADIATING SURFACES

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专利权人:

Helmut Halfmann

发明人:

Helmut Halfmann,Axel Hombach,Markus Roth

申请号：

US13812870

公开号：

US20130216431A1

申请日:

2011.10.26

申请国别(地区):

US

年份:

2013

代理人:

摘要：

In various embodiments, a device for irradiating surfaces is provided. The device may include a radiation emitter having a radiation emitter vessel, wherein the radiation emitter vessel has at least one tunnel-like passage and a structure configured to allow a process gas to flow through the at least one tunnel-like passage.

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