PROBLEM TO BE SOLVED: To provide a mechanism capable of efficiently removing a sterilization agent which is left in a path where the sterilization agent passes.SOLUTION: A sterilization device comprises: a storage pipe for storing the sterilization agent a vaporization chamber for vaporizing the sterilization agent which is stored in the storage pipe a sterilization chamber into which the sterilization agent which is vaporized in the vaporization chamber is introduced pressure reduction means for reducing pressure in the sterilization chamber a first valve which is provided in a path where the storage pipe and ambient air are in a conductive state a second valve which is provided in a path where the storage pipe and the vaporization chamber are in a conductive state, the second valve being provided for sucking the ambient air contained in the storage pipe for storing the sterilization agent into the vaporization chamber a third valve which is provided in the path where the storage pipe and the vaporization chamber are in the conductive state, the third valve being provided for introducing the sterilization agent stored in the storage pipe into the vaporization chamber and a fourth valve which is provided in a path where the vaporization chamber and the sterilization chamber are in a conductive state. The sterilization device is configured so that the pressure reduction means reduces pressure, in a state of closing the third valve, and opening the first valve, the second valve, and the fourth valve.SELECTED DRAWING: Figure 18COPYRIGHT: (C)2017,JPO&INPIT【課題】滅菌剤が通る経路に残留した滅菌剤を効果的に取り除くことができる仕組みを提供すること。【解決手段】滅菌剤が貯留される貯留管と、貯留管に貯留された滅菌剤を気化する気化室と、気化室で気化された滅菌剤が導入される滅菌室と、滅菌室を減圧する減圧手段と、貯留管と大気とが導通する経路に設けられた第1弁と、貯留管と気化室とが導通する経路に設けられた第2弁であって、滅菌剤が貯留されている貯留管に含まれる大気を気化室に吸い出すために設けられた第2弁と、貯留管と気化室とが導通する経路に設けられた第3弁であって、貯留管に貯留された滅菌剤を気化室に導入するために設けられた第3弁と、気化室と滅菌室とが導通する経路に設けられた第4弁と、を備え、滅菌装置が、第3弁を閉め、第1弁、第2弁、及び第4弁を開けた状態で、減圧手段による減圧を行うことを特徴とする。【選択図】 図18
