PROBLEM TO BE SOLVED: To provide a differential pressure sensor module that can remove noise voltage from the output voltage of a cantilever type differential pressure sensor, and can accurately output, as output voltage, only the pressure difference between the front side and rear side of a diaphragm mechanism due to a fluid as an original measuring object in a flow channel.SOLUTION: The differential pressure sensor module includes: a bypass channel connected to a flow channel via a pair of openings a cantilever portion that is installed in the bypass channel, bends and deforms in accordance with the pressure difference between fluids on both sides, and has a generated piezoresistance resistance detecting means for detecting the resistance change amount of the piezoresistance following the bending and deformation of the cantilever portion and outputting it as voltage to an output terminal and a low-pass filter disposed on the output terminal side of the resistance detecting means.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2018,JPO&INPIT【課題】カンチレバー型の差圧センサの出力電圧からノイズ電圧を除去し、流路内における本来の測定対象物である流体による絞り機構前後の圧力差のみを出力電圧として正確に出力できる差圧センサモジュールを提供する。【解決手段】対の開口を介して流路と連結されるバイパス路と、前記バイパス路内に設置され、両面の流体の圧力差に応じて撓み変形すると共にピエゾ抵抗が形成されたカンチレバー部と、前記カンチレバー部の撓み変形に伴う前記ピエゾ抵抗の抵抗変化量を検出し、出力端子に電圧として出力する抵抗検出手段と、前記抵抗検出手段の前記出力端子側に設けられたローパスフィルタと、を有することを特徴とする差圧センサモジュール。【選択図】図1
