PROBLEM TO BE SOLVED: To provide a hydrogen peroxide gas decontamination method capable of stably decontaminating a decontamination object space by suitably managing relative moisture and hydrogen peroxide gas concentration, and a device therefor.SOLUTION: There is provided a hydrogen peroxide gas decontamination device, comprising: a circulation flow passage 2 connected to a decontamination object space 1 an air blow means 3 of blowing air and circulating the same a humidity sensor 5 of detecting the relative humidity in the air in the circulation flow passage 2 the first branched flow passage 6 connected to the circulation flow passage 2 and provided with a compression pump 25 and a polymer membrane type air drier 26 a flow rate regulation means 8 a hydrogen peroxide feed means 9 and a control part 10 connected with the humidity sensor 5 and the flow rate regulation means 8. The relative humidity and the hydrogen peroxide gas concentration can be suitably managed by the control of the flow rate regulation means 8 based on the relative humidity detected by the humidity sensor 5 connected to the control part 10, thus the decontamination object space 1 can be stably decontaminated.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT