PROBLEM TO BE SOLVED: To provide a stable supply device for a hydrogen peroxide solution which supplies a minute amount such as the flow rate of 5-40 ml/min of comparatively concentrated hydrogen peroxide solution of 10-35 mass% to a bactericide gasification device and minimizes the fluctuation of the flow rate and measurement error due to bubbles (oxygen gas) in a liquid supply piping apt to generate in the minute amount of flow.SOLUTION: A stable supply device for a hydrogen peroxide solution is composed to arrange an air chamber 5 (an air chamber type accumulator with membrane) for restraining pulsation of the discharged hydrogen peroxide solution at the downstream side of a plunger pump 4, to dispose a deaeration module 7 for removing a gas in the above solution at the downstream side of the air chamber 5, to equip a nozzle part having a pressurizing mechanism 9 to spray the hydrogen peroxide solution into a bactericide gasification device 12, and to use a core in order to reduce the change of piping cross section generating at the piping connection part.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】10~35質量%という比較的高濃度の過酸化水素水を流量5~40ml/分という微少量で殺菌剤ガス化装置に供給する装置であって、流量微少時に生じやすい、送液配管内での気泡(酸素ガス)による流量の変動や、計測誤差を最小とする過酸化水素水の安定供給装置を提供すること【解決手段】プランジャポンプ4の下流側に、吐出された過酸化水素水の脈動を抑止するエアチャンバー部5(メンブレン付エアチャンバー式アキュムレータ)を配置し、該エアチャンバー部5の下流側に、過酸化水素水中のガスを除去する脱気モジュール7を配置し、過酸化水素水を殺菌剤ガス化装置12内に噴霧する、加圧機構9を有するノズル部とし、配管接続部に生じる配管断面積の変化を減少させるために、中子を使用する構成とした。【選択図】図1
