AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;SINGAPORE HEALTH SERVICES PTE. LTD.
发明人:
Wai Pan CHAN,Margarita Sofia MARDUCCI,Yuan GAO,Julius Ming Lin TSAI,Ruiqi LIM,Ming-Yuan CHENG,Abdur Rub Abdur RAHMAN,Mi Kyoung PARK,Minkyu JE,Jai Prashanth RAO
申请号：
US14897578
公开号：
US20160135749A1
申请日:
2014.06.12
申请国别(地区):
US
年份:
2016
代理人:
摘要：
There is provided a monolithically integrated multimodal sensor device for intracranial neuromonitoring, the sensor device including: a single substrate； a temperature sensor formed on a first portion of the single substrate for detecting temperature； a pressure sensor formed on a second portion of the single substrate for detecting intracranial pressure； and an oxygen sensor formed on a third portion of the single substrate for detecting oxygen concentration. In particular, sensing portions of the temperature sensor, the oxygen sensor and the pressure sensor, respectively, are formed at different layers of the sensor device. There is also provided an integrated multimodal sensor system incorporating the sensor device and the associated methods of fabrication.
