PROBLEM TO BE SOLVED: To enhance spatial resolution in measurement of an object to be measured that eliminates the need of high sensitivity while enhancing the sensitivity in measurement of a magnetic field.SOLUTION: In a first cell array 10a, a plurality of first cells having detection surfaces through which magnetic fluxes pass when being disposed in a magnetic field of an object to be measured is disposed in a lattice shape. In a second cell array 10b, a plurality of second cells having detection surfaces larger than those of the plurality of first cells is disposed in gaps among the first cells in a lattice shape. A first irradiation section 20a irradiates light to the detection surfaces of the plurality of first cells, and a second irradiation section 20b irradiates light to the detection surfaces of the plurality of second cells. A first detection section 30a detects a rotation angle of a polarization plane of the light transmitted through the plurality of first cells and outputs a signal according to the rotation angle, and a second detection section 30b detects a rotation angle of a polarization plane of the light transmitted through the plurality of second cells and outputs a signal according to the rotation angle. An analysis device 40 selects the signal output from the first detection section 30a or the second detection section 30b and calculates intensity of a magnetic field of the object to be measured by using the signal.COPYRIGHT: (C)2013,JPO&INPIT【課題】磁場の測定における感度を高めるとともに高い感度を必要としない測定対象の測定における空間分解能を高める。【解決手段】第1セルアレイ10aは、測定対象の磁場の中に配置されたときに磁束が通る検出面を有する複数の第1セルを格子状に配置する。第2セルアレイ10bは、第1セルよりも大きい検出面を有する複数の第2セルを第1セル同士の間隙に格子状に配置する。第1照射部20aは複数の第1セルの検出面に光を照射し、第2照射部20bは複数の第2セルの検出面に光を照射する。第1検出部30aは複数の第1セルを透過した光の偏光面の回転角を検出してその回転角に応じた信号を出力し、第2検出部30bは複数の第2セルを透過した光の偏光面の回転角を検出てその回転角に応じた信号を出力する。解析装置40は第1検出部30aまたは第2検出部30bから出力された信号を選択し、その信号を用いて測定対象の磁場の強度を算出する。【選択図】図1
