PROBLEM TO BE SOLVED: To provide a stacked ultrasonic vibration device which can be manufactured inexpensively, and in which a piezoelectric body is prevented from being damaged due to stress caused by the difference of thermal expansion coefficient between a metal block as a mass material and the metal block.SOLUTION: In a stacked ultrasonic vibration device, a plurality of piezoelectric bodies 61 are provided between two mass materials 42, 43, and by using the two mass materials 42, 43 and brazing filler metals 73, 76 having an elastic constant smaller than that of the plurality of piezoelectric bodies 61, a plurality of piezoelectric bodies 61 becoming similar material bonding portions are bonded by a first metal bonding layer having a first thickness d1, and a plurality of piezoelectric bodies 61 becoming dissimilar material bonding portions and the mass materials 42, 43 are bonded by a second metal bonding layer having a second thickness d2 thicker than the first thickness d1.COPYRIGHT: (C)2015,JPO&INPIT【課題】 安価に製造できると共に、マス材としての金属ブロックと圧電体の熱膨張係数の差異に起因して生じる応力によって圧電体が破損などすることを防止した積層型超音波振動デバイスの提供。【解決手段】 積層型超音波振動デバイスは、2つのマス材42,43の間に複数の圧電体61が設けられており、2つのマス材42,43および複数の圧電体61よりも弾性定数が小さなろう材73,76を用いて、同種材料接合部となる複数の圧電体61間を第1の厚さd1を有した第1の金属接合層によって接合し、異種材料接合部となる複数の圧電体61とマス材42,43との間を第1の厚さd1よりも厚い第2の厚さd2を有した第2の金属接合層によって接合した。【選択図】図10
