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Integrated photo-acoustic gas sensor module
专利权人:
Infineon Technologies AG
发明人:
Thomas Mueller,Horst Theuss,Klaus Elian,Rainer Markus Schaller,Stefan Kolb
申请号:
US15349438
公开号:
US10451543B2
申请日:
2016.11.11
申请国别(地区):
US
年份:
2019
代理人:
摘要:
A photo-acoustic gas sensor is disclosed. The photo-acoustic gas sensor includes a substrate, a light emitter unit supported by the substrate, the light emitter unit including a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit supported by the substrate, the detector unit including a microphone, wherein the beam of light pulses traverses an area intended to accommodate the gas and the microphone can receive a signal oscillating with the repetition frequency.
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