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METHOD FOR CHARACTERIZING WAFERS IN INTERFERENCE IMAGING DATA TO SAMPLES
专利权人:
カール ツアイス メディテック アクチエンゲゼルシャフト
发明人:
クマール、アビシェーク,タムリンソン、アレクサンダー アール.,ライトゲープ、ライナー,タムリンソン、アレクサンダー アール.
申请号:
JP2015555722
公开号:
JP6412017B2
申请日:
2014.01.31
申请国别(地区):
JP
年份:
2018
代理人:
摘要:
Systems and methods for sub-aperture correlation based wavefront measurement in a thick sample and correction as a post processing technique for interferometric imaging to achieve near diffraction limited resolution are described. Theory, simulation and experimental results are presented for the case of full field interference microscopy. The inventive technique can be applied to any coherent interferometric imaging technique and does not require knowledge of any system parameters. In one embodiment of the present invention, a fast and simple way to correct for defocus aberration is described. A variety of applications for the inventive method are presented.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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