PROBLEM TO BE SOLVED: To prevent cooling operation time from being extended in a vacuum cooling apparatus for reducing pressure in a cooling pool by a dry type vacuum pump.SOLUTION: The vacuum cooling apparatus configured to cool an object to be cooled by evacuating the inside of a cooling pool, includes: a cooling pool 2 for accommodating the object to be cooled a vacuum pump 1 for sucking air from the cooling pool a pressure detection device 7 for detecting pressure in the cooling pool a vacuum pump dry valve 4 for sending outside air to the vacuum pump and a vacuum valve 6 for preventing air sucked from the vacuum pump dry valve from being sent to the cooling pool. In the vacuum cooling apparatus, pressure P1 in the cooling pool at the start of cooling operation and pressure P2 in the cooling pool after the lapse of predetermined time from the cooling operation start are detected, an assumed pressure value in the cooling pool during cooling operation is calculated from the pressures P1 and P2, and when the pressure in the cooling pool during the cooling operation is higher than the assumed pressure value, cooling operation is stopped, and dry operation for actuating the vacuum pump while supplying outside air to the vacuum pump through the vacuum pump dry valve is performed.COPYRIGHT: (C)2014,JPO&INPIT【課題】ドライ式の真空ポンプによって冷却槽内を減圧する真空冷却装置であって、冷却運転時間が長くなることを防止する。【解決手段】被冷却物を収容する冷却槽2、冷却槽内の空気を吸引する真空ポンプ1、冷却槽内の圧力を検出する圧力検出装置7、外気を真空ポンプへ送るための真空ポンプ乾燥弁4、真空ポンプ乾燥弁から吸引した空気が冷却槽へ送られることを防止する真空弁6を持ち、冷却槽内を真空化することで被冷却物の冷却を行う真空冷却装置において、冷却運転開始時における冷却槽内の圧力P1と、冷却運転開始から所定時間経過後における冷却槽内圧力の圧力P2を検出し、圧力P1と圧力P2から冷却運転時における冷却槽内の想定圧力値を算出しておき、冷却運転中の冷却槽内圧力が想定圧力値よりも高くなっていた場合、冷却運転を中断し、真空ポンプ乾燥弁を通じて真空ポンプへ外気を供給しながら真空ポンプを作動する乾燥運転を行う。【選択図】図1
