PROBLEM TO BE SOLVED: To provide a processing apparatus causing particles discharged in a direction inclined to pass therethrough within a predetermined angle range.SOLUTION: A processing apparatus according to one embodiment comprises a generation source arrangement part, a first body arrangement part, and a first collimator. A particle generation source capable of discharging particles is arranged at the generation source arrangement part. A first body is arranged at the first body arrangement part. The first collimator is arranged between the generation source arrangement part and first body arrangement part, and has a plurality of first walls and a plurality of second walls, a plurality of first through holes which extend in a first direction from the generation source arrangement part toward the first body arrangement part are formed of the plurality of first walls and the plurality of second walls, and each of the plurality of second walls is provided with at least one first passage.SELECTED DRAWING: Figure 1【課題】所定の角度の範囲内で傾斜した方向に放出された粒子を通過させる処理装置を提供する。【解決手段】一つの実施形態の処理装置は、発生源配置部と、第１の物体配置部と、第１のコリメータとを備える。前記発生源配置部に、粒子を放出することが可能な粒子発生源が配置される。前記第１の物体配置部に第１の物体が配置される。前記第１のコリメータは、前記発生源配置部と前記第１の物体配置部との間に配置され、複数の第１の壁と、複数の第２の壁と、を有し、前記複数の第１の壁及び前記複数の第２の壁によって、前記発生源配置部から前記第１の物体配置部へ向かう第１の方向に延びる複数の第１の貫通孔を形成し、前記複数の第２の壁にそれぞれ少なくとも一つの第１の通路が設けられる。【選択図】図１
