Use of dams to improve yield in film processing
- 专利权人:
- Beuford A. Bogue
- 发明人:
- Beuford A. Bogue,Alexander Mark Schobel,Keith J. Kendall
- 申请号：
- US12711883
- 公开号：
- US08956685B2
- 申请日:
- 2010.02.24
- 申请国别(地区):
- US
- 年份:
- 2015
- 代理人:
- 摘要：
- The present invention relates to methods for forming films. In particular, the present invention relates to the formation of films on a substrate, the substrate having at least one dam portion.
- 来源网站：
- 中国工程科技知识中心
