Methods and system provide a focused spot having a cross-sectional size within a range from about 50 um to about 200 um full width half maximum (FWHM)； the corresponding cavitation can be similarly sized within similar ranges. The ultrasound beam can be focused and pulsed at each of a plurality of locations to provide a plurality of cavitation zones at each of the target regions. Each pulse may comprise a peak power within a range generating focal negative peak pressures within a range from about 10 MPa to about 80 MPa. While the treatment pulses can be arranged in many ways within a region, in many instances the pulses can be spaced apart within a region to provide intact tissue such as intact sclera between pulses.
