Hideto Ishiguro,Tsukasa Eguchi,Hitoshi Tsuchiya,Megumu Ito
申请号：
US15041617
公开号：
US09772224B2
申请日:
2016.02.11
申请国别(地区):
US
年份:
2017
代理人:
摘要：
A component measurement apparatus includes: a sensor module that receives reflected light and outputs a signal corresponding to light intensity of the reflected light a calibration plate that outputs first reflected light to the sensor module, the first reflected light being used for comparing the light intensity of the reflected light and a calibration unit that switches the input reflected light to the sensor module between the second reflected light reflected at a measured portion, and the first reflected light.
