PROBLEM TO BE SOLVED: To detect a defective element with high accuracy without X-ray irradiation.SOLUTION: The x-ray detector comprises: an X-ray detection element plate 126 having a detection surface extending toward a first direction and a second direction in which X-ray detection elements for converting incoming x-rays into light are arranged in a matrix in the first direction and the second direction orthogonal to each other a photoelectric conversion substrate 125 for converting the light into electrical signals a wiring board 124 having a wiring circuit for reading the electrical signals a collimator section 120 in which a plurality of collimator plates 113 for absorbing or scattering x-rays that are inclined to an axis parallel to a third direction orthogonal to the first direction and the second direction and incident on the detection surface are arranged in spaced relationship with a gap 152 therebetween and a light irradiation section 122 for irradiating the detection surface with light from a light irradiation point. The collimator section 120 is disposed on the detection surface in such a manner that the gap 152 faces the X-ray detection elements. The light irradiation section 122 is spaced from a path of x-rays incident on the detection surface and disposed at a position in which the light emitted from the light irradiation point is incident on the whole surface of the detection surface.COPYRIGHT: (C)2013,JPO&INPIT【課題】X線を照射することなく、欠陥素子を高精度に検出する。【解決手段】入射されたX線を光に変換するX線検出素子を、直交する第1の方向及び第2の方向にマトリクス状に配列し、第1の方向及び第2の方向に広がる検出面を有するX線検出素子基板126と、前記光を電気信号に変換する光電変換基板125と、前記電気信号を読み出す配線回路を有する配線基板124と、第1の方向及び第2の方向に直交する第3の方向と平行な軸に対して傾いて検出面に入射するX線を吸収または散乱するコリメータ板113を複数備え、これらのコリメータ板を、すき間152を空けて配列したコリメータ部120と、光を光照射点から検出面に照射する光照射部122と、を備える。コリメータ部120は、すき間152がX線検出素子と向かい合うように、検出面上に配置する。光照射部122は、検出面に入射するX線の行路から退避した位置、かつ光照射点から照射された光が、検出面の全面に入射する位置に配置される。【選択図】図3
