露光装置
- 专利权人:
- HOYA株式会社
- 发明人:
- 増川 祐哉,伊藤 俊一,入山 兼一
- 申请号：
- JP2006294161
- 公开号：
- JP5424529B2
- 申请日:
- 2006.10.30
- 申请国别(地区):
- JP
- 年份:
- 2014
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To provide an exposure apparatus with short exposure time by shortening a time taken for opening/closing a light path.
SOLUTION: When a time taken for the end 203 of a shutter window 202 to pass through a stop part 312 is shortened, a blade diaphragm 300 is rotationally turned in the right direction in Figure. As the blade diaphragm 300 rotationally turns in the right direction, the width of the stop part 312 on the light path 440 is narrowed. A time in which an observation site is illuminated depends on a time taken for the shutter window 202 to pass through the stop part 312, namely the width of the stop part 312. Thereby, the time taken for the shutter window 202 to pass through the stop part 312 can be shortened. When the blade diaphragm 300 rotationally turns to the rightmost direction in Figure, the narrowest site of the blade diaphragm 312 is positioned on the light path 440. At this moment, the time taken for the shutter window 202 to pass through the stop part 312 becomes shortest. This method can shorten the illumination time of the light illuminated by a light source device and provide an image with no blur.
COPYRIGHT: (C)2008,JPO&INPIT
- 来源网站：
- 中国工程科技知识中心
