TOMASZ BAJRASZEWSKI,トマシュ バラッシュスキー,MACIEJ SZKULMOWSKI,マチェイ シュクルモフスキー,MAREK ROZANSKI,マレック ロザンスキー,YOSHIDA TAKUSHI,吉田 拓史
申请号：
JP2012190642
公开号：
JP2014045908A
申请日:
2012.08.30
申请国别(地区):
JP
年份:
2014
代理人:
摘要：
PROBLEM TO BE SOLVED: To acquire a tomographic image of an object to be tested accurately even when phase characteristics that can be corrected by considering dispersion as phase characteristics of interference light and irregular phase characteristics that cannot be corrected even by considering dispersion are included.SOLUTION: An imaging apparatus is provided with: a division part for dividing light of a measurement light source into reference light and measurement light an interference signal correction part for separating, by using information showing phase characteristics of interference light between return light from the object to be tested with respect to the measurement light and the reference light, a signal including the information showing the phase characteristics of the interference light and a signal which does not include the information showing the phase characteristics of the interference light, from the interference light and a tomographic image acquisition part for acquiring a tomographic image of the object to be tested by using the signal which does not include the information showing the phase characteristics of the interference light.COPYRIGHT: (C)2014,JPO&INPIT【課題】 干渉光の位相特性として分散を考慮して補正できる位相特性と、分散を考慮しても補正できない不規則な位相特性とが含まれる場合にも精度よく被検査物の断層画像を取得すること。【解決手段】撮像装置は、測定光源の光を参照光と測定光とに分割する分割部と、測定光に対する被検査物からの戻り光と参照光との干渉光の位相特性を示す情報を用いて、干渉光から干渉光の位相特性を示す情報が含まれる信号と、干渉光の位相特性を示す情報が含まれない信号とを分離する干渉信号補正部と、干渉光の位相特性を示す情報が含まれない信号を用いて、被検査物の断層画像を取得する断層画像取得部とを備える。【選択図】 図4
