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検出装置、及び、検出システム
专利权人:
キヤノン株式会社
发明人:
渡辺 実,横山 啓吾,大藤 将人,川鍋 潤,藤吉 健太郎,和山 弘
申请号:
JP2013103325
公开号:
JP6164924B2
申请日:
2013.05.15
申请国别(地区):
JP
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a detection device capable of achieving both of good adhesion between an impurity semiconductor layer and a pixel electrode and good dark current characteristics of a conversion element, and securing good transfer speed.SOLUTION: In a detection device having a conversion element 12 which has a pixel electrode, an impurity semiconductor layer 123 and a semiconductor layer 124 in order from a substrate 100 side and converts radioactive ray or light into electrical charge, the pixel electrode contains a metal layer 122 having a gap 122 formed in a region overlapping an orthogonal projection of the semiconductor layer 124.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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