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Optical image measurement apparatus and optical attenuator
专利权人:
Shigeru Okikawa
发明人:
Shigeru Okikawa,Tomoyoshi Abe
申请号:
US13518240
公开号:
US09072457B2
申请日:
2010.11.16
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A cam face 303a of a cam 303 has a shape depending on the distribution of the light amount in the cross-section of reference light LR. When the cam 303 is rotated by a stepping motor 302, an abutment 312 moves following the displacement of the cam face 302a with the rotation of the cam 303. A light-blocking link 310 rotates about the axis of rotation 311 with the movement of the abutment 312. A shield 313 moves in a first direction with the rotation of the light-blocking link 310 to change the shielding region of the reference light LR. A light-blocking plate 400 can shield the reference light LR from a second direction different from a shielding direction (first direction) by an attenuator 300. The light-blocking plate 400 is moved by a drive mechanism 410 and changes the shielding region.
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