THE UNITED STATES OF AMERICA, AS REPRESENED BY THE SECRETARY OF COMMERCE
发明人:
Sanford Norman A.,Chiaramonti Debay Ann
申请号：
US201715632959
公开号：
US10153144(B2)
申请日:
2017.06.26
申请国别(地区):
美国
年份:
2018
代理人:
Office of Chief Counsel for National Institute of Standards and Technology
摘要：
A extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being field evaporated from the sample in response to the sample being subjected to the EUV radiation; and an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector.
