The present invention provides for a deuterium enriched monoterpene or sesquiterpene such as perillyl alcohol or a deuterium enriched isomer or analog of monoterpenes or sesquiterpenes such as isoperillyl alcohol. The present invention also provides for a deuterium enriched derivative of a monoterpene or sesquiterpene such as a perillyl alcohol carbamate or a deuterium enriched derivative of an isomer or analog of a monoterpene or sesquiterpene such as an isoperillyl alcohol carbamate. The deuterium enriched derivative may be perillyl alcohol or isoperillyl alcohol conjugated with a therapeutic agent such as a chemotherapeutic agent. The present invention also provides for a method of treating a disease such as cancer comprising the step of delivering to a patient a therapeutically effective amount of a deuterium enriched compound.