The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at least one gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit in communication with the contacting device.本發明揭示一種臭氧水輸送系統，其包含：至少一接觸裝置，其與經組態以提供超純水之至少一超純水源連通；至少一超純水導管，其耦合至該超純水源；至少一溶液，其經由該超純水導管而與該接觸裝置及該超純水源連通；一或多個氣源，其含有至少一氣體，該一或多個氣源與該超純水源、該超純水導管及溶液導管之至少一者連通；至少一混合氣體導管，其與該至少一氣源及該接觸裝置連通且經組態以提供至少一混合氣體至該接觸裝置；及至少一臭氧水輸出導管，其與該接觸裝置連通。
