CLEAN ROOM DEVICE WITH MOVABLE ELECTROMAGNETIC RADIATION SOURCE
- 专利权人:
- 发明人:
- 申请号：
- EP11805517.7
- 公开号：
- EP2654807A1
- 申请日:
- 2011.12.22
- 申请国别(地区):
- EP
- 年份:
- 2013
- 代理人:
- 摘要：
- A clean room device (300) which comprises a movably configured electromagnetic radiation source (302) for irradiating parts of a clean room equipment (304) with electromagnetic radiation for decontaminating a surface to be treated of the clean room equipment (304).
- 来源网站：
- 中国工程科技知识中心
